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AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match
AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match

AE APEX 3013 RF Generator Advanced Energy 3156114-003 AMAT 0920-00107 RF Match

$ 3273.6

Availability: 100 in stock
  • Country/Region of Manufacture: China
  • Item must be returned within: 14 Days
  • Refund will be given as: Money Back
  • Brand: Advanced Energy
  • Model: APEX 3013
  • Wafer Processing Component Type: RF Generator
  • Restocking Fee: No
  • Condition: Tested, Guaranteed fully functional. Physical condition is rough with scratches and marks, comes as pictured in photos.
  • Return shipping will be paid by: Buyer
  • All returns accepted: Returns Accepted
  • MPN: 3156114-003

    Description

    Here is an Advanced Energy APEX 3013 RF Generator with internal integrated PIN diode Switch Match and V/I probe.  This generator uses a V/I probe to calculate load power and impedance.  The integrated Switch Match uses pin diodes to set the output impedance(default is 15-j6.7ohms).  This generator has been tested into a 15-j7 ohm load to full load power of 3000W and is fully functional.  Used on Applied Materials chambers.
    Unit comes as pictured.  Unit has a rough cosmetic appearance and is missing 1 mounting PEM fastener and 2 surface mounting posts- see pictures.
    AE M/N 3156114-003
    AMAT P/N: 0920-00107
    Input: 208VAC 3 phase @14.5A per phase.
    Output: 3000W @ 13.56MHz via custom output connector, default output impedance 15-j6.7ohms
    Cooling: water cooled
    Tested, Guaranteed Fully Functional
    Additional item info:
    No additional parts, accessories, manuals, or cables are included, unless specifically pictured and stated as part of the listing.
    Shipping:
    I will ship via FedEx on your account at no additional charge. (Sorry, I do Not ship UPS or DHL, as their service is not reliable in my area.)
    If you need expedited shipping, let me know. Many times I can ship same or next day.
    I only ship to your ebay shipping address, so make sure it is correct BEFORE you purchase an item.
    Payment:
    PayPal, credit cards(processed through PayPal), or Bank Wire Transfers in USD(for purchases over 00 USD( fee added for wire transfers))
    Contact:
    If you feel you have not received 5 Star service, or have any questions, please contact me directly through ebay messages.  I am more than happy to help and resolve any issues or help with technical questions.
    International buyers:
    International buyers are responsible for all Customs, Duties, Taxes, Broker, and Any Other Fees or Forms associated with Importing Items from the USA
    .
    Returns:
    Please double check Part Numbers, Interfaces, Software, Compatibility, and Communication Requirements BEFORE you purchase an item.
    Returns are ONLY accepted for Warranty and items that don't match the item description.
    All returns must include all original undamaged items, in resalable condition with all original packaging including manuals, warranty forms, cables, etc.
    Please note: Warranty is Void and Returns will NOT be Accepted if Tamper Seals are Broken or Removed, or unit was connected to improper supply voltage.