-40%
NEW heated vat series 16.2 ISO63 pendulum gate vacuum valve CVD / ETCH AMAT uhv
NEW heated vat series 16.2 ISO63 pendulum gate vacuum valve CVD / ETCH AMAT uhv
NEW heated vat series 16.2 ISO63 pendulum gate vacuum valve CVD / ETCH AMAT uhv

NEW heated vat series 16.2 ISO63 pendulum gate vacuum valve CVD / ETCH AMAT uhv

$ 950.4

Availability: 100 in stock
  • MPN: Does Not Apply
  • Refund will be given as: Money Back
  • Return shipping will be paid by: Buyer
  • All returns accepted: Returns Accepted
  • Condition: New
  • Item must be returned within: 14 Days
  • Restocking Fee: No
  • UPC: Does not apply
  • Brand: vat

    Description

    Model: 16536-PH21-AFI1
    Type: Pendulum Control Valve
    Series Number ……………………………………………………..… 16
    Series Name ……………………………………………………………. Pendulum Valve
    Actuator types ……………………………………………………..… Pneumatic actuator (
    single acting with closing
    spring NC)
    Sealing technology …………………………………………….….. SEALRING-System
    Sealing Gate ……………………………………………………..……. FKM (VITON®)
    Sealing Bonnet ………………………………………………………. FKM (VITON®)
    Feedthrough ………………………………………………………….. Rotary feedthrough
    Leak rate body ………………………………………………………. < 1
    .
    10
    -8
    mbar ls
    -1
    Leak rate Seat …………………………………………….………….. < 1
    .
    10
    -8
    mbar ls
    -1
    Nominal inside diameters (ID) in mm (inch) …………. 63 (2 1/2")
    Body material ………………………………………………………… Aluminum
    Cycles until first service ………………………………………… 200'000 cycles